Nitride based laser diode and method of manufacturing nitride based laser diode

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United States of America Patent

PATENT NO 7936798
APP PUB NO 20080107144A1
SERIAL NO

11660345

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Abstract

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The laser diode comprising crystalline substrate (1) where set of subsequent n-type layers, set of optically active layers (5) and set of p-type layers is deposited. The set of n-type layers comprise at least one buffer layer (2), bottom n-type cladding layer (3) and n-type bottom waveguide layer. The set of p-type layers comprise at least p-type upper waveguide, which comprises electron blocking layer, upper p-type cladding layer (7) and p-type contact layer (8). The electron blocking layer comprises In.sub.x, Al.sub.yGa.sub.1-x-y, N alloy doped with magnesium where 1.gtoreq.x>0.001 a 1.gtoreq.y 0. The way of making this invention is based on the epitaxial deposition of subsequent set of the n-type layers (2, 3, 4), set of optically active layers (5) and set of p-type layers (6, 7, 8) where the p-type waveguide layer (6) and p-type contact layer (7) is deposited with presence of indium in plasma assisted molecular beam epitaxy method.

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Patent Owner(s)

Patent OwnerAddress
INSTYTUT WYSOKICH CISNIEN POLSKIEJ AKADEMII NAUKUL SOKOLOWSKA 29/37 WARSZAWA PL-01-142

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Boćkowski, Michal Warsaw, PL 1 1
Feduniewicz-Zmuda, Anna Rzeszów, PL 1 1
Grzegory, Izabella Warsaw, PL 6 195
Leszczyński, Michal Lesznowola, PL 2 1
Perlin, Piotr Warsaw, PL 7 2
Porowski, Sylwester Warsaw, PL 6 195
Siekacz, Marcin Turek, PL 2 1
Skierbiszewski, Czeslaw Warsaw, PL 3 24
Suski, Tadeusz Nowy Prázmów, PL 8 112
Wiśniewski, Przemyslaw Warsaw, PL 1 1

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