Method and apparatus for determining the stability of an electroless plating bath

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United States of America Patent

PATENT NO 7932094
APP PUB NO 20100035356A1
SERIAL NO

12228008

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Abstract

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The stability of an electroless plating bath for depositing a metal (e.g., nickel) is determined by titrating a sample of the plating bath with a titrant comprising ions of a catalytic metal (e.g., palladium) and detecting hydrogen released at the titration endpoint. The quantity of titrant required to attain the endpoint provides a measure of the stability of the electroless plating bath.

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Patent Owner(s)

Patent OwnerAddress
KLA CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aleynik, Semyon Tenafly, US 1 14
Bratin, Peter Flushing, US 19 230
Shalyt, Eugene Washington Township, US 28 175

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