LPP EUV light source drive laser system

United States of America Patent

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Apr 19, 2011
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Apr 16, 2009
app pub date
Oct 24, 2008
filing date
Jun 29, 2005

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laser. The drive laser redirecting mechanism may comprise a mirror.

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CYMER INC	CALIFORNIA USA CALIFORNIA

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Inventor Name	Address	# of filed Patents	Total Citations
Bykanov, Alexander N	San Diego, US	35	1433
Ershov, Alexander I	San Diego, US	150	5453
Fomenkov, Igor V	San Diego, US	156	5670
Khodykin, Oleh V	San Diego, US	8	188

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LPP EUV light source drive laser system

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United States of America Patent

12288970

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PATENT NO	7928417
APP PUB NO	20090095925A1
SERIAL NO	12288970
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
April 19, 2011	US,7928417,B2 US7928417B2	GRANTED PATENT AS SECOND PUBLICATION
April 16, 2009	US,20090095925,A1 US20090095925A1	FIRST PUBLISHED PATENT APPLICATION

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12288970

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