Phase plate, imaging method, and electron microscope
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United States of America Patent
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Apr 19, 2011
Grant Date -
Jan 7, 2010
app pub date -
Oct 26, 2007
filing date -
Nov 24, 2006
priority date (Note) -
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Abstract
The invention concerns a phase plate for electron optical imaging, wherein the zero beam (4) is phase-shifted in order to obtain an image with optimum contrast through interference with the diffracted electron beams (5, 5'). The shading of diffracted electron beams (5, 5') is kept to a minimum and shading that cannot be reconstructed from the obtained image data is prevented. This is achieved in that the electrode (1') is designed as a shielded conductor (7), which is disposed to extend from a mounting (8) in a substantially radial direction towards the area of the zero beam (4), wherein the shielded conductor (7) has an end (9) in front of the area of the zero beam (4) such that a field (6) is formed between the conductor (7) and the shielding (10) surrounding it, which overlaps this area. The invention also concerns an imaging method for complete reconstruction of the image and an electron microscope (12) which is provided with the phase plate (1).
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