Method of making BIOMEMS devices
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Apr 19, 2011
Grant Date -
Jul 8, 2010
app pub date -
Jan 4, 2010
filing date -
Jan 5, 2009
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A MEMS device is manufactured by first forming a self-aligned monolayer (SAM) on a carrier wafer. Next, a first polymer layer is formed on the self-aligned monolayer. The first polymer layer is patterned form a microchannel cover, which is then bonded to a patterned second polymer layer on a device wafer to form microchannels. The carrier wafer is then released from the first polymer layer.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully