MEMS oscillator
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United States of America Patent
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Apr 12, 2011
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N/A
app pub date -
Feb 20, 2009
filing date -
Feb 22, 2008
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Abstract
Provided is a MEMS oscillation circuit which performs temperature compensation of a MEMS resonator with a simple circuit, which is mild so that an output clock does not have jitter, and which makes the range of fluctuations of a reference frequency from a reference value equivalent to a range of digital processing. The MEMS oscillator includes a MEMS resonator, a temperature measurement unit for measuring a temperature and outputting a detected voltage corresponding to the temperature, and a bias voltage control circuit for applying the MEMS resonator with a bias voltage which changes the resonant frequency of the MEMS resonator in a manner opposite to a change of the resonant frequency of the MEMS resonator due to temperature change correspondingly to the detected voltage.
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