Method of measuring length of measurement object article in micro-structure
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United States of America Patent
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Apr 12, 2011
Grant Date -
Sep 28, 2006
app pub date -
Feb 3, 2006
filing date -
Feb 10, 2005
priority date (Note) -
Expired
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Abstract
A substrate comprises a substrate main body having a surface on which a measurement object article is to be formed. A reference scale is disposed on the surface of the substrate main body in the vicinity of a region of the surface where the measurement object article is to be formed. The reference scale has adjacent graduations spaced-apart a preselected distance from one another.
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