Method and apparatus for an in-situ ultraviolet cleaning tool
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United States of America Patent
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Apr 12, 2011
Grant Date -
Sep 21, 2006
app pub date -
Dec 13, 2005
filing date -
Dec 16, 2004
priority date (Note) -
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Abstract
The present invention provides an apparatus and a method for an ultraviolet cleaning tool. The cleaning tool includes ultraviolet source spaced apart from a surface having contaminant particles. The ultraviolet source can create ozone between the surface and the ultraviolet source which breaks the chemical bonds between particles and the surface. The apparatus includes a gas feed which introduces a gas to aid the chemical bond. Additionally, the gas feed can introduce a gas to remove the particles from the surface.
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