Bonding apparatus and bonding method

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United States of America Patent

PATENT NO 7913737
APP PUB NO 20070272351A1
SERIAL NO

10581851

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Abstract

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, and are allowed to stand for a fixed period of time, so that warping is corrected.

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Patent Owner(s)

Patent OwnerAddress
SHIBAURA MECHATRONICS CORPORATION5-1 KASAMA 2-CHOME SAKAE-KU YOKOHAMA-SHI KANAGAWA 247-8610

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nishigaki, Hisashi Yokohama, JP 11 75
Takeuchi, Hachiya Yokohama, JP 2 3
Tanabe, Shohei Yokohama, JP 5 1

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