Low-energy method for fabrication of large-area sputtering targets
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Mar 22, 2011
Grant Date -
Sep 11, 2008
app pub date -
Nov 5, 2007
filing date -
May 5, 2005
priority date (Note) -
In Force
status (Latency Note)
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Abstract
In various embodiments, large-area sputtering targets are formed by providing a plurality of sputtering targets each comprising a backing plate and a refractory metal layer disposed thereon, and spray depositing a refractory metal powder on an interface between the sputtering targets, the refractory metal powder consisting essentially of the same metal as each refractory metal layer, thereby joining the refractory metal layers of the sputtering targets.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
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H C STARCK SURFACE TECHNOLOGY AND CERAMIC POWDERS GMBH | LANDSBERGER STR 98 MUENCHEN 80339 |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
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Gaydos, Mark | Nashua, US | 19 | 366 |
# of filed Patents : 19 Total Citations : 366 | |||
Kumar, Prabhat | Framingham, US | 94 | 1335 |
# of filed Patents : 94 Total Citations : 1335 | |||
Miller, Steve A | Canton, US | 1 | 30 |
# of filed Patents : 1 Total Citations : 30 | |||
Zimmermann, Stefan | Laufenburg, DE | 59 | 707 |
# of filed Patents : 59 Total Citations : 707 |
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Patent Citation Ranking
- 30 Citation Count
- C23C Class
- 74.62 % this patent is cited more than
- 14 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
Full Text

Legal Events
Date | Code | Event | Description |
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Mar 08, 2010 | STCH | INFORMATION ON STATUS: PATENT DISCONTINUATION | free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362 |
Feb 10, 2010 | FP | LAPSED DUE TO FAILURE TO PAY MAINTENANCE FEE | Effective Date: Feb 10, 2010 |
Feb 10, 2010 | LAPS | LAPSE FOR FAILURE TO PAY MAINTENANCE FEES | |
Sep 14, 2009 | REMI | MAINTENANCE FEE REMINDER MAILED | |
Jul 07, 2005 | FPAY | FEE PAYMENT | year of fee payment: 8 |
Jun 26, 2001 | FPAY | FEE PAYMENT | year of fee payment: 4 |
Feb 10, 1998 | I | Issuance | |
Jan 18, 1996 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:SCHAFFNER, JAMES H.;YAP, DANIEL;REEL/FRAME:007848/0674 Owner name: HUGHES AIRCRAFT COMPANY, CALIFORNIA Effective Date: Jan 18, 1996 |
Feb 21, 1995 | F | Filing | |
Feb 21, 1995 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:GABILLARD, BERTRAND;RIVIER, MICHEL;REEL/FRAME:007369/0299;SIGNING DATES FROM 19950201 TO 19950202 Owner name: INTERNATIONAL BUSINESS MACHINES CORPORATION, NEW Y |
Jul 07, 1994 | PD | Priority Date |

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