Creating and applying variable bias rules in rule-based optical proximity correction for reduced complexity
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United States of America Patent
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Mar 15, 2011
Grant Date -
Apr 20, 2006
app pub date -
Sep 8, 2005
filing date -
Oct 15, 2004
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Abstract
An optical proximity correction (OPC) based integrated circuit design system and method introduce a variable rule in which rules are specified in terms of multiple correction actions that yield acceptable results. This category of rules provides more degrees of freedom in actual application so that the rule-based OPC tool can intelligently select the proper valid rule that minimizes the OPC complexity or meets other objectives.
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