Control methods for micromirror devices implemented with a single address electrode
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United States of America Patent
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Mar 15, 2011
Grant Date -
Sep 11, 2008
app pub date -
Feb 25, 2008
filing date -
Feb 26, 2007
priority date (Note) -
Expired
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Abstract
A method for controlling a micromirror device including mirror elements each composed of a micromirror supported on a substrate by an elastic hinge, and a address electrode arranged across the deflection axis of the micromirror comprises deflecting the micromirror by changing a potential to a predetermined waveform for the address electrode.
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