Micromirror device with a single address electrode
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United States of America Patent
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Mar 15, 2011
Grant Date -
Aug 28, 2008
app pub date -
Feb 25, 2008
filing date -
Feb 26, 2007
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A micromirror device comprises a plurality of mirrors arranged on a substrate, an elastic hinge for supporting each mirror to be deflectable, an address electrode having first and second regions arranged across the deflection axis of each mirror, a driving circuit for controlling a deflection of the mirror, and a stopper provided in a position of making contact with the mirror in a deflected state of the mirror. When the mirror makes contact with the stopper, the potential of the mirror or the stopper changes.
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