Electromechanical resonator and manufacturing method thereof
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United States of America Patent
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Mar 15, 2011
Grant Date -
Oct 30, 2008
app pub date -
Jan 21, 2008
filing date -
Jan 23, 2007
priority date (Note) -
Expired
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Abstract
An electromechanical resonator includes a resonator portion which includes a fixed electrode and an oscillator formed separately from the fixed electrode with a gap. The gap has a first gap region and a second gap region which are arranged in a thickness direction of the fixed electrode. The first gap region is different in width from the second gap region.
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