Method for calibrating a metrology tool
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United States of America Patent
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Mar 15, 2011
Grant Date -
May 6, 2010
app pub date -
Jan 4, 2010
filing date -
Jul 17, 2003
priority date (Note) -
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Abstract
A method and apparatus for calibrating a metrology tool are disclosed. The apparatus includes a substrate having at least one calibration site formed thereon. The calibration site includes a pattern of cells that have at least one feature disposed in a surface of the substrate. The feature provided for measurement by a step height metrology tool and a phase metrology tool to calibrate the step height and phase metrology tools.
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