High temperature-stable sensor

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United States of America Patent

PATENT NO 7893510
APP PUB NO 20060170015A1
SERIAL NO

11179109

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Abstract

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A high temperature-stable sensor is provided in which electrodes on a substrate or an insulation layer are in contact with a sensitive layer, wherein the electrodes have platinum, rhodium, or iridium or an electrically conductive oxide layer. For this purpose, an intermediate product is provided as a platform chip, which has a deposited layer made of platinum, rhodium, or iridium or an alloy of platinum, rhodium, or iridium and is covered by an electrically conductive oxide. From the deposited layer, a conductive structure is formed and thus a platform chip is created with an electrically conductive structure subject to external influences. This structure has an electrically conductive oxide and/or its parts have long-term, stable characteristic resistance curves under high-temperature loading above about 500° C., especially between about 600° C. and 950° C. A sensor with a gas-sensitive layer formed as a gas-sensitive sensor is preferred.

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Patent Owner(s)

Patent OwnerAddress
HERAEUS SENSOR TECHNOLOGY GMBHHERAEUSSTRASSE 12-14 HANAU 63450

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ullrich, Karlheinz Gross-Umstadt, DE 16 108
Wienand, Karlheinz Aschaffenburg, DE 55 389

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