High-bandwidth actuator drive for scanning probe microscopy
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United States of America Patent
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Feb 15, 2011
Grant Date -
Feb 5, 2009
app pub date -
Jul 31, 2007
filing date -
Jul 31, 2007
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An actuator subsystem for use in a scanning probe microscope (SPM) system having a probe for measuring a sample comprises and actuator and an actuator driving circuit. The actuator operates in the SPM system to generate relative motion between the probe and the sample while the SPM system collects data indicative of a property of the sample. The relative motion includes a range of motion of at least 1 micron. The actuator driving circuit applies a drive signal to the actuator to cause the relative motion, and has a small signal bandwidth of at least 200 kHz with a phase lag of not more than 100 degrees within the small signal bandwidth.
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