Integrated unit for electrical/reliability testing with improved thermal control
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United States of America Patent
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Feb 15, 2011
Grant Date -
Aug 12, 2010
app pub date -
Feb 10, 2009
filing date -
Feb 10, 2009
priority date (Note) -
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Abstract
In accordance with an aspect, a thermally-controllable integrated unit is configured to hold devices under test. The integrated unit includes at least one heater board, comprised of a thermally-conductive material and provided with at least one global heater configured to globally heat the DUT board. A DUT board of the integrated unit includes a DUT board in thermal contact with the at least one heater board, the DUT board including a plurality of sockets, each socket configured to hold at least one DUT. The DUT has conductor paths to conduct electrical signals between test equipment and the terminals of DUTs in the sockets. Each socket includes an associated temperature sensor and a separately controllable local heater configured to, based on a temperature indication from the temperature sensor, heat a DUT in that socket.
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