Processes for the purification of trichlorosilane and silicon tetrachloride

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Feb 1, 2011
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Nov 14, 2005
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Nov 19, 2004

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Abstract

The present disclosure relates to processes and systems for purifying technical grade trichlorosilane and/or technical grade silicon tetrachloride into electronic grade trichlorosilane and/or electronic grade silicon tetrachloride.

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GLOBALWAFERS CO LTD	NO 8 INDUSTRIAL EAST ROAD 2 SCIENCE-BASED INDUSTRIAL PARK HSINCHU

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Inventor Name	Address	# of filed Patents	Total Citations
Ghetti, Gianfranco	Novara, IT	3	16

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Processes for the purification of trichlorosilane and silicon tetrachloride

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United States of America Patent

11719688

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DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
February 01, 2011	US,7879198,B2 US7879198B2	GRANTED PATENT AS SECOND PUBLICATION
December 25, 2008	US,20080314728,A1 US20080314728A1	FIRST PUBLISHED PATENT APPLICATION

PATENT NO	7879198
SERIAL NO	11719688
DOCKET NO

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11719688

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