Spatial light modulator and mirror array device
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United States of America Patent
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Jan 25, 2011
Grant Date -
May 21, 2009
app pub date -
Nov 13, 2008
filing date -
Nov 16, 2007
priority date (Note) -
Expired
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Abstract
The present invention provides a spatial light modulator, comprising: a plurality of mirror elements; a plurality of address electrodes for controlling the movement of each of the mirror elements; and first and second control circuits for generating a voltage in the address electrode, wherein the second control circuit applies a voltage to the address electrode when the mirror element is in a moving state.
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