X-ray photoelectron spectroscopy analysis system for surface analysis and method therefor
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United States of America Patent
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Jan 25, 2011
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app pub date -
Oct 3, 2007
filing date -
Oct 3, 2006
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Abstract
arranged to generate a deflection field upstream of the sample surface. The deflection field is configured to deflect the unwanted electrons away from the sample direction, such that the unwanted electrons are prevented from reaching the sample surface.
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