Scanning probe microscope and scanning method
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United States of America Patent
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Jan 18, 2011
Grant Date -
Jul 3, 2008
app pub date -
Dec 20, 2007
filing date -
Dec 22, 2006
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Abstract
To realize to adapt to a shape of a surface, shorten a measurement time period and promote a measurement accuracy by setting a sampling interval in accordance with a slope of the shape of the surface and controlling a stylus in accordance with the interval, there is provided a scanning probe microscope, in which in scanning the stylus, an observation data immediately therebefore is stored as a history, the sampling interval in X or Y direction is set at each time based on a shape of the observation data, and the stylus is scanned to a successive sampling position.
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