MEMS device with two axes comb drive actuators
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United States of America Patent
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Jan 18, 2011
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N/A
app pub date -
Dec 12, 2002
filing date -
Dec 13, 2001
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Abstract
In certain embodiments, a MEMS actuator is provided comprising a frame and a movable structure coupled to the frame. A vertical comb drive is provided between the frame and the movable structure to actuate the movable structure.
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