Family

Loading Family data...

• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
MAX-PLANCK-GESELLSCHAFT ZUR FORDERUNG DER WISSENSCHAFTEN E V	HOFGARTENSTRASSE 8 MUNCHEN 80539

International Classification(s)

• H05H:PLASMA TECHNIQUE

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Annaratone, Beatrice	München, DE	1	3
Fink, Martin	Mintraching, DE	20	138
Jacob, Wolfgang	Garching, DE	15	155
Konopka, Uwe	Neufahrn, DE	4	44
Morfill, Gregor	München, DE	22	342
Sato, Noriyoshi	Sendai, JP	36	451
Shimizu, Tetsuji	Garching, DE	17	301
Stuffler, Timo	Seefeld, DE	4	44
Thomas, Hubertus M	Pfaffenhofen/Ilm, DE	1	3

Cited Art Landscape

Load Citation

• No Cited Art to Display

Loading Cited Art Landscape...

Patent Citation Ranking

Forward Cite Landscape

Load Citation

• No Forward Cites to Display

Loading Forward Cite Landscape...

Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
January 11, 2011	US,7869556,B2   US7869556B2	GRANTED PATENT AS SECOND PUBLICATION
June 12, 2008	US,20080136332,A1   US20080136332A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 7869556

Method and device for the operation of a plasma device

---

 

Legal Events