Method and apparatus of automatic scanning probe imaging
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United States of America Patent
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Jan 4, 2011
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app pub date -
Sep 12, 2008
filing date -
Sep 12, 2007
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Abstract
A method of operating a scanning probe microscope (SPM) includes scanning a sample as a probe of the SPM interacts with a sample, and collecting sample surface data in response to the scanning step. The method identifies a feature of the sample from the sample surface data and automatically performs a zoom-in scan of the feature based on the identifying step. The method operates to quickly identify and confirm the location of features of interest, such as nano-asperities, so as to facilitate performing a directed high resolution image of the feature.
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