In-phase/in-quadrature demodulator for spectral information of interference signal

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United States of America Patent

PATENT NO 7864327
SERIAL NO

12351639

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Sinusoidal in-phase and in-quadrature signals at a given spatial frequency are combined with the irradiance signals generating a correlogram of interest and integrated over the length of the correlogram data-acquisition scan. The integration outputs are then used to calculate the amplitude and the phase of the correlogram signal at the selected spatial frequency, thereby producing targeted spectral information. The signal generator used to generate the in-phase and in-quadrature sinusoidal signals may be scanned advantageously through any desired range of spatial frequencies, thereby producing corresponding amplitude and phase spectral information for the correlogram. Because the procedure produces spectral information independently of the number of data frames acquired during the interferometric scan, it is materially more rapid than conventional FFT analysis.

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Patent OwnerAddress
VEECO METROLOGY INC112 ROBIN HILL ROAD SANTA BARBARA CA 93117

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Dong Tucson, US 558 5317

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