Imprint stamp comprising cyclic olefin copolymer
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United States of America Patent
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Dec 21, 2010
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N/A
app pub date -
Jun 12, 2006
filing date -
Jun 10, 2005
priority date (Note) -
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Abstract
A method is provided for transferring a pattern from a template (1) to an object (12) in an imprint process, using a two-step process. The first step includes contacting a pattern of the template surface with a polymer material comprising one or more Cyclic Olefin Copolymers (COCs), to produce a flexible polymer replica having a structured surface with an inverse of the pattern of the template surface. In a second step, after releasing the flexible polymer replica from the template, the inverse pattern of the flexible polymer replica is pressed into a resist layer on a substrate, to imprint a replica of the pattern of the template surface in therein.
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