Vacuum pump damping adapter
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United States of America Patent
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Dec 21, 2010
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app pub date -
Mar 21, 2005
filing date -
Mar 22, 2004
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Abstract
The invention concerns a damping adapter (3) insertable in a suction duct between a service chamber (2) and a vacuum pump (1). The adapter (3) consists of a tubular duct wall (6) in the form of a flexible bellows surrounded by a damping sleeve (7) supported on two end flanges (4, 5). The flexible bellows' plys (6a, 6b) receive a passive damping elastomer (8a) on their outer faces, engaged between the successive plys (6a, 6b). This considerably reduces the transmitting of vibrations from the vacuum pump (1) to the service chamber (2), enabling applications in the microscopy field in particular.
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