Ion pump having emission containment

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United States of America Patent

PATENT NO 7850432
SERIAL NO

11531811

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An ion pump having emissions containment. The ion pump includes an anode constructed from a plurality of tubes and a cathode constructed from plates positioned on opposite sides of the anode and positioned apart from the anode. The anode and cathode are positioned within a gastight housing having a gas inlet. A blocking shield assembly is provided within the line of sight between the gas inlet and the cathode. The blocking shield assembly is also provided within the line of sight between the gas inlet and any surface within the ion pump that itself is within the line of sight of the cathode. The blocking shield assembly prevents photons and neutral particles from being emitted from the ion pump.

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Patent Owner(s)

Patent OwnerAddress
EDWARDS VACUUM LLC6416 INDUCON DRIVE WEST SANBORN NY 14132

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Clough, Stephen P Shakopee, US 1 5
Golla, Robert Dale Maple Grove, US 1 5

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