Measuring equipment

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United States of America Patent

PATENT NO 7847931
SERIAL NO

11666078

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A measuring equipment utilizing terahertz pulse light, includes: a terahertz light generator that generates terahertz pulse light; a terahertz light detector that detects terahertz pulse light; a first condensing optical system that condenses the terahertz pulse light generated by the terahertz light generator; and a second condensing optical system that condenses the terahertz pulse light diverging after being condensed by the first condensing optical system, onto the terahertz light detector. A sample is arranged in a vicinity of a position of condensing the terahertz pulse light by the first condensing optical system; and at least one of the first and the second condensing optical systems includes at least one optical device having a positive or negative refractive power. The measuring equipment further includes: a position adjusting mechanism that adjusts a position of the at least one optical device on an optical axis when the terahertz light detector detects the terahertz pulse light having transmitted through the sample; and a controlling unit that controls the position adjusting mechanism.

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Patent Owner(s)

Patent OwnerAddress
NIKON CORPORATION12-1 YURAKUCHO 1-CHOME CHIYODA-KU TOKYO 100-8331
TOCHIGI NIKON CORPORATIONOTAWARA-SHI TOCHIGI 3248625

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fukushima, Kazushiro Nasushiobara, JP 1 22
Tsumura, Naoki Kamiina-gun, JP 31 342

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