Microscopic inspection apparatus for reducing image smear using a pulsed light source and a linear-periodic superpositioned scanning scheme to provide extended pulse duration, and methods useful therefor
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United States of America Patent
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Nov 30, 2010
Grant Date -
Nov 12, 2009
app pub date -
Oct 12, 2006
filing date -
Oct 12, 2005
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An automated optical inspection system includes a pulsed light source illuminating an article to be inspected thereby to generate at least one image thereof, at least one camera having a field of view, and a relative motion provider operative to provide relative motion between the camera and at least one image of at least a portion of the article. The relative motion provider may include a first continuous motion provider and a second, velocity-during-imaging-lessening motion provider. The relative motion is a superposition of a first continuous component of motion provided by the first motion provider and a second, smaller component of motion provided by the second motion provider which lessens the velocity of the at least one image relative to the camera, during imaging.
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