Sputter apparatus with a pipe cathode and method for operating this sputter apparatus
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United States of America Patent
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Nov 30, 2010
Grant Date -
Jun 28, 2007
app pub date -
Aug 3, 2006
filing date -
Dec 22, 2005
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A sputter apparatus with a pipe cathode is arranged such that the supply of power, cooling fluid and other media to the pipe cathode takes place via flexible lines or tubes which can be wound about a receptor. If the pipe cathode completes a pendulum movement, the lines and/or tubes are wound onto the receptor or wound from it. The pendulum movement of the pipe cathode is preferably such that the pipe cathode is rotated by a certain first angle in a first direction and subsequently by a certain second angle in a second direction, the second angle differing from the first angle. Methods for operating the sputter apparatus are also disclosed.
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