Equipment innovations for nano-technology aquipment, especially for plasma growth chambers of carbon nanotube and nanowire
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United States of America Patent
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Nov 30, 2010
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app pub date -
Jan 9, 2006
filing date -
Jan 9, 2006
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Abstract
Nano-technology is an emerging and intensely competitive field. There are a number of companies that work mainly in the development of various Nano-technology areas. One area that has not received too much emphasis is that of specialized equipment for Nano-technology. Nanoinstruments is a company working to rectify this deficiency in the field of nano-material deposition, especially in Carbon Nanotube and Nanowire growth. A number of innovations disclosed include the use of a low thermal mass heating unit that allows fast changes in temperature of the growth sample while providing sufficient thermal stability, uniformity and electrical isolation, a novel shower head design for providing uniform gas flow while eliminating thermal and plasma decomposition of feed stock at the nozzle, a pulsed voltage waveform that eliminates charging of substrate on which the growth has to take place, and the use of a conductive grid over insulating substrates to achieve uniform plasma over the growth surface.
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