Importance

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Abstract

A piezoelectric actuator comprising a stack of piezoelectric layers formed from a piezoelectric material, a plurality of internal electrodes disposed throughout the stack to define active regions of the piezoelectric material therebetween which are responsive to a voltage applied across two or more groups of the internal electrodes in use, an insulating arrangement which at least partially covers at least one surface of the stack to define a piezoelectric/insulator interface, and two or more side electrodes to connect with the two or more groups of the internal electrodes. At least one bridging arrangement extends through the insulating arrangement and comprises a conductive material, so as to provide a connection between a side electrode and an internal electrode, wherein at least one first surface, defined by an interface between the conductive material and the insulating arrangement, and at least one second surface, defined by an internal boundary of a piezoelectric layer, are substantially continuous with one another in the vicinity of the piezoelectric/insulator interface.

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First Claim