Electro-mechanical component, such as a strained Si Fin-FET
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United States of America Patent
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Nov 23, 2010
Grant Date -
Aug 14, 2008
app pub date -
Jan 31, 2004
filing date -
Apr 11, 2003
priority date (Note) -
Expired
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Abstract
The present invention is an electro mechanical component, such as a nano-electro-mechanical component, having a first, a second and a third portion arranged such that the second portion is used to functionally connect the first and the third portion. In the present invention, the second portion is a bilayer having a first and a second layer made from two dissimilar at least semiconductive materials; the two materials have different lattice constants; and the first layer harbors tensile strain close to an interface connecting the first and the second layer and harbors compressive strain at its surface; and the second layer harbors compressive strain close to the interface connecting the first and the second layer and tensile strain at the relaxed outer section.
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