Process of purification of amidoxime containing cleaning solutions and their use
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United States of America Patent
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Nov 23, 2010
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app pub date -
Oct 29, 2008
filing date -
Oct 29, 2008
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Abstract
The invention relates to processes for producing and using amidoxime compounds with low trace metal impurities. The invention further relates to compositions comprising amidoxime compounds with low trace metal impurities, such compositions useful for cleaning or removing residues from semiconductor substrates and/or equipment.
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