Image forming method and charged particle beam apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Oct 19, 2010
Grant Date -
Jul 12, 2007
app pub date -
Mar 5, 2007
filing date -
Jul 29, 2005
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An image forming method and a charged particle beam apparatus suitable for suppressing the inclination of charging when scanning a two-dimensional area with a charged particle beam. A third scanning line located between a first scanning line and a second scanning line is scanned. After the first, second and third scanning lines have been scanned, a plurality of scanning lines are scanned between the first and third scanning lines and between the second and third scanning lines.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully