End point detection method, end point detection device, and gas phase reaction processing apparatus equipped with end point detection device
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United States of America Patent
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Oct 19, 2010
Grant Date -
Oct 22, 2009
app pub date -
Aug 22, 2006
filing date -
Sep 2, 2005
priority date (Note) -
Expired
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Abstract
An end point detection method in the case where a catalyst arranged in a treatment chamber of a gas phase reaction processing apparatus is heated at high temperature by supplying electric power thereto and the treatment is carried out by cracking a reaction gas by the catalyst heated at high temperature, comprises the steps of supplying the electric power to the catalyst from a constant current source, detecting electric potential difference between both ends of the catalyst, performing primary differentiation of the detected electric potential difference, and determining an end point of the treatment based on obtained primary differential value.
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