Method of process trend matching for identification of process variable

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United States of America Patent

PATENT NO 7813893
APP PUB NO 20080177399A1
SERIAL NO

11655024

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Abstract

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A method that involves matching the trend of process outcome with the trend of process variables to identify the variables that have an impact on the process outcome is disclosed. The method for process trend matching comprises processing of raw data of process outcome and of process variables using an outlier filtering method, smoothing these data using common smoothing algorithm like Kernel, dividing smoothed raw data equally into time intervals, computing the gradients of the points at both ends of the time intervals, and translating the gradients into a scale based on the magnitude of the gradients. The following steps comprise comparing the process outcome and each process variable independently for same time frame, and assigning a score for both outcome and variable. The sum of the scores is then computed which is used to determine the quality of fit. A real-time monitoring system is then set up to monitor these variables for any drifts. When a drift is detected, troubleshooting activity will be triggered and actions taken to resolve the drift, after which monitoring of the variable will be restarted.

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Patent Owner(s)

Patent OwnerAddress
TECH SEMICONDUCTOR SINGAPORE PTE LTD1 WOODLANDS INDUSTRIAL PARK D STREET 1 738799

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fong, Kien Hoong Singapore, SG 1 6
Fu, Wei Singapore, SG 114 549
Shi, Jun Singapore, SG 255 3204

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