Arrangement for the regulation of the electron beam power of an electron gun

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United States of America Patent

PATENT NO 7808183
APP PUB NO 20060250092A1
SERIAL NO

11373865

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An arrangement for the regulation of the electron beam power of an electron gun, which comprises a filament cathode, a block cathode and an anode. Between the filament cathode and the block cathode is applied a first voltage, while between the block cathode and the anode a second voltage is applied. With the aid of a first closed-loop regulated system the filament cathode is regulated to a constant current value, which has a filament temperature sufficient for the maximum beam power of the block cathode. A second closed-loop regulated system, such including a block power regulator, which is acted upon by the difference between instantaneous block power value and nominal block power value, regulates the voltage between the filament cathode and the block cathode.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS GMBH & CO KGGERMAN ARZIW LAURA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Klemm, Günter Nidda, DE 3 10
Schneider, Hans-Jürgen Wachtersbach, DE 3 14
Thiede, Andreas Dresden-Schonborn, DE 11 73

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