Determining dopant information
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United States of America Patent
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Sep 28, 2010
Grant Date -
May 15, 2008
app pub date -
Sep 11, 2007
filing date -
Nov 15, 2006
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Abstract
Methods that include using a noble gas ion beam to determine dopant information for a sample are disclosed, the dopant information including dopant concentration in the sample, dopant location in the sample, or both.
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