Coating for harsh environments and sensors using same
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United States of America Patent
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Sep 21, 2010
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app pub date -
Apr 20, 2006
filing date -
Apr 20, 2006
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Abstract
A coating providing high abrasion and chemical resistance composed of a barrier layer from vanadium, molybdenum, niobium, tantalum and the like, and an outer layer of diamond-like carbon. The coating is especially applicable for acoustic wave device (AWD) based sensors, and for passivating an electrode such as an electrode deposited on the AWD sensing area. The coating provides excellent mechanical and acoustical characteristics for coating acoustic wave devices allowing the sensor to operate in harsh environments.
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