Termination for trench MIS device
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Sep 14, 2010
Issued Date -
N/A
app pub date -
Sep 21, 2005
filing date -
Mar 26, 2004
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A trench MIS device is formed in a P-epitaxial layer that overlies an N-epitaxial layer and an N+ substrate. In one embodiment, the device includes an N-type drain-drift region that extends from the bottom of the trench to the N-epitaxial layer. Preferably, the drain-drift region is formed at least in part by fabricating spacers on the sidewalls of the trench and implanting an N-type dopant between the sidewall spacers and through the bottom of the trench. The drain-drift region can be doped more heavily than the conventional “drift region” that is formed in an N-epitaxial layer. Thus, the device has a low on-resistance. The device can be terminated by a plurality of polysilicon-filled termination trenches located near the edge of the die, with the polysilicon in each termination trench being connected to the mesa adjacent the termination trench.
First Claim
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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
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SILICONIX INCORPORATED | SANTA CLARA CA |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
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Chen, Qufei | San Jose, US | 22 | 406 |
# of filed Patents : 22 Total Citations : 406 | |||
Darwish, Mohamed N | Campbell, US | 140 | 2644 |
# of filed Patents : 140 Total Citations : 2644 | |||
Qi, Jainhai | San Jose, US | 5 | 181 |
# of filed Patents : 5 Total Citations : 181 | |||
Terrill, Kyle W | Santa Clara, US | 15 | 280 |
# of filed Patents : 15 Total Citations : 280 |
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Patent Citation Ranking
- 92 Citation Count
- H01L Class
- 95.72 % this patent is cited more than
- 15 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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