Sheet for mounting polishing workpiece and method for making the same
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United States of America Patent
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Sep 7, 2010
Grant Date -
Jan 3, 2008
app pub date -
Jul 3, 2006
filing date -
Jul 3, 2006
priority date (Note) -
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status (Latency Note)
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Abstract
The present invention relates to a sheet for mounting a polishing workpiece. The sheet comprises a substrate, a surface layer and a slightly rough layer. The substrate has a surface. The surface layer is located on the surface of the substrate, with no hole structure existing in the interior thereof, and has a surface. The slightly rough layer is located on the surface of the surface layer to carry and mount the polishing workpiece, with no hole structure existing in the interior thereof. Accordingly, when the polishing workpiece contacts the slightly rough layer, the air therebetween is easily vented out via the slightly rough layer, without the phenomenon of air wrapping, which increases the adsorption force between the polishing workpiece and the sheet.
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