Packaging device and packaging method for hollow cathode type sputtering target
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United States of America Patent
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Sep 7, 2010
Grant Date -
Jun 14, 2007
app pub date -
Sep 14, 2004
filing date -
Oct 15, 2003
priority date (Note) -
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Abstract
Provided are a packaging device and packaging method of a hollow cathode sputtering target which installs, in the hollow cathode sputtering target, a cover of a size capable of covering a void of the target; provides one or more through-holes to the cover; places a resin bag over them, and performs vacuum suction to the inside of the bag. This packaging device and packaging method of a hollow cathode sputtering target is capable of performing vacuum suction even to the inside of the hollow portion covered with the resin bag.
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