Multiple fanned laser beam metrology system
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United States of America Patent
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Aug 31, 2010
Grant Date -
May 10, 2007
app pub date -
Apr 19, 2006
filing date -
Nov 9, 2005
priority date (Note) -
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Abstract
Systems and techniques for laser metrology. Two or more fanned probe beams are scanned relative to a surface including one or more targets. A position detection module receives return beam information from the fanned probe beams, and determines a position of at least a first target of the one or more targets based on the return beam information.
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