Multipole coils
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United States of America Patent
Stats
-
Aug 31, 2010
Grant Date -
Apr 2, 2009
app pub date -
Sep 22, 2008
filing date -
Sep 25, 2007
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Multipole coils (1, 2, 3, 4, 5, 6) for influencing particle beams have at least two coils (1, 2) which concentrically enclose an imaginary axis (10), wherein a winding (7) made from a flexible circuit board (8) is formed by means of conducting paths (9) disposed thereon for each coil (1, 2, 3, 4, 5, 6) and the circuit boards (8) are rolled into at least one circuit board layer (11, 12, 13, 14). Multipole coils of this kind (1, 2, 3, 4, 5, 6) are utilized for aberration correction in particle optics, wherein the windings (7) of the multipole coils (1, 2, 3, 4, 5, 6) form windows (16) whose width in the peripheral direction is chosen in such a fashion that no secondary interfering fields occur and whose length in the axial direction corresponds at least to its width.
First Claim
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International Classification(s)
Cited Art Landscape
Patent Citation Ranking
- 6 Citation Count
- H01J Class
- 4.16 % this patent is cited more than
- 15 Age
