Method and apparatus for ion source positioning and adjustment
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United States of America Patent
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Aug 31, 2010
Grant Date -
Dec 22, 2005
app pub date -
Jun 18, 2004
filing date -
Jun 18, 2004
priority date (Note) -
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Abstract
The invention is directed to a method and apparatus for ion source positioning and adjustment. According to one embodiment, the invention relates to an apparatus for ion source positioning and adjustment. The apparatus comprises a bottom plate, a middle plate and a top plate, wherein the top plate is coupled to the middle plate by at least one adjustment member for causing the top plate to move in a first direction, wherein the at least one adjustment member positions the top plate in a predetermined position with respect to the middle plate; and the middle plate is coupled to the bottom plate by a worm gear assembly for causing the middle plate to move in a second direction with respect to the bottom plate.
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