Material deposition
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United States of America Patent
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Aug 31, 2010
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N/A
app pub date -
Dec 7, 1998
filing date -
Dec 5, 1997
priority date (Note) -
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Abstract
An apparatus for and method of depositing material on a substrate, the method comprising the steps of: delivering from a first outlet a stream of droplets of a precursor liquid towards a substrate; applying an electric field between the first outlet and the substrate; and delivering from a second outlet a flow of fuel about the stream of droplets such as to provide an annular flame combustion region between the first outlet and the substrate through which at least a portion of the stream of droplets passes before reaching the substrate, whereby the precursor liquid is one or both of chemically reacted and decomposed to provide the deposited material.
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