Cr-doped FeCoB based target material and method for producing the same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Aug 24, 2010
Grant Date -
Mar 13, 2008
app pub date -
Aug 14, 2007
filing date -
Aug 16, 2006
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
There is disclosed a method for producing a Cr-doped FeCoB based target material that can be used efficiently in magnetron sputtering processes and has a low magnetic permeability. In the method for producing the target material, there are firstly provided raw-materials of two or more kinds of FeCoB based alloy powders which are different in composition from each other, wherein at least one of the FeCoB based alloy powders comprises Fe and Co in a total amount of 60 atom % or more such that Fe:Co atomic ratio is within a range of 70:30 to 40:60, and comprises Cr in an amount which is from 15 to 25 atom % greater than B. Then, the two or more kinds of the FeCoB based alloy powder are mixed and consolidated to form a target material.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully